000			00553nam a2200181Ia 4500
003			OSt
008			181001s2004 xx 000 0 und d
020			_a9780195136050
082			_a621.3815 _bCAM
100			_aCampbell, Stephen A.
245		0	_aScience and engineering of microelectronic fabrication
250			_a2nd
260			_aNew Delhi: _bOxford University Press, _c©2004
300			_axiv, 603p
440			_aThe oxford series in electrical and computer engineering
650			_aElectronics and Communication Engineering
942			_2ddc _cBK
999			_c2319 _d2319