000 00356nam a2200133Ia 4500
003 OSt
008 181001s2009 xx 000 0 und d
082 _a621.395
_bGAN
100 _aGandhi, S. K.
245 0 _aVLSI fabrication principles
260 _bWiley India,
_aNew Delhi:
_c©2009
650 _aElectronics and Communication Engineering
942 _2ddc
_cBK
999 _c5998
_d5998