| 000 | 00479nam a2200181Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 181001s2015 xx 000 0 und d | ||
| 020 | _a9788126532605 | ||
| 082 |
_a621.38152 _bMAY |
||
| 100 | _aMay, Gary S. | ||
| 245 | 0 | _aFundamentals of semiconductor fabrication | |
| 250 | _a1st | ||
| 260 |
_bWiley India, _aNew Delhi: _c©2015 |
||
| 300 | _axiii, 305p. | ||
| 650 | _aElectronics and Communication Engineering | ||
| 700 | _aSze, Simon M. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c7419 _d7419 |
||